1、Description：
Incident lights with wavelengths range between 200-1700nm vertically shine on the surface of thin film, when transmittance of thin film happen, ATGX310 can utilize lights reflected via upper and lower boundaries of thin film to create an interference pattern superimposed, the spacing of the pattern’s sinusoidal waves, when combined with the refractive index of the material, can be used to calculate the thickness of the materials.
2、What is the structure of Thin Film Measurement System?
Thin Film Measurement System compose of Fiber Optic Spectrometer（ATP3010P）,R3 Measurement holder( R3）,Deuterium Halogen Light Sources（ATG1020）, Fiber collimator（FIBH-2-UV）, and UV fiber（FIB-600-UV
 

3、Features
Specifications:
1. Optical system:
Deuterium Halogen light source
Collimating mirror 
Receiver：Optic fiber spectrometer
Wavelength：200-1100
Range measured：0-100%
Technical parameters:
Wavelength accuracy ±0.5nm
Wavelength repeat ≤0.2nm
Spectral bandwidth: 1nm
Stay light ≤0.05%
Transmittance accuracy ±0.5%
Transmittance repeat ≤0.5% 
Datasheet of Thin Film Measurement System:

ATGX310 specification
Item	ATGX310-VIS	ATGX310-XR	ATGX310-DUV	ATGX310-NIR
Wavelength range	400-850nm	250-1060nm	190-1100nm	900-1700nm
Thick range	50nm-20um	10nm-100um	1nm-100um	100nm-250um
Thick resolution	0.1nm	0.1nm	0.1nm	0.1nm
repeatability	0.3nm	0.3nm	0.3nm	1.0nm
Incident angle	90℃
Film Layers	Up to10 layers
Sample materials	Transparent/semi-transparent
Modes Measured	Reflectance & Transmittance
Rough film thickness measured	Yes
Speed measured	Minimum 1ms
Online	Y	Y	Y	Y
Light spot size	Standard: 200um or 400um
	Customized: 100um
Microscope configured	Y
CCD imaging	Y
Scan options	150mmX300mm	150mmX300mm	150mmX300mm	150mmX300mm
	Xy scan platform
Vacuum	Y

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